2.4 Checking and Adjustment
2.4.1 Checking the reticle position against the XY stage
movement direction
1䋮 Place a small workpiece on the stage glass and bring it into focus.
2䋮 Turn the Micrometer Heads to align an edge of the workpiece with the center of the cross-hair.
3䋮 While turning the Micrometer Head to move the workpiece left and right, turn the angle dial so
that the horizontal cross-hair is oriented to coincide with the direction of the stage movement.
㪋㪅 Loosen the vernier clamp screw. Align the “0” graduation on the angle dial with that of the
vernier scale. Ensure the margin is sufficient for adjusting the vernier scale position. If space for
adjusting the vernier scale position is limited, re-adjust the vernier scale position by referring to
"2.4.3 (1) Adjusting the reticle to the XY stage movement direction".
㩷
㩷
2.4.2 Checking the centering of the reticle㩷
Small workpiece
To perform dimensional measurement by turning the angle dial or after replacing the reticle, align the
cross-hair with the center of rotation of the angle dial, as follows.
㩷
1䋮 Place a small workpiece on the stage glass and bring it into focus.
2䋮 Turn the Micrometer Heads to align an edge of the workpiece with the center of the cross-hair.
3䋮 Turn the angle dial 180q. Make sure the edge of the workpiece remains within 3μm of the center of the
cross-hair. If it is not within 3μm, adjust the center of the reticle by referring to "2.4.3 (2) Centering
the reticle".
2. Installation and setup
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