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3. Measurement
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3.1.7 Bringing the measuring surface into focus
Bring the measuring surface into focus by moving the optical tube up and down with the focusing
knob. Look into the eyepiece to make sure the cross-hairs are kept in ocular focus during this
focusing operation.
CAUTION
If moving the optical tube, be careful, especially if the workpiece is stepped or is secured with
fixing jigs, not to bump the workpiece.
3.1.8 Positioning the workpiece
Align the measuring direction of the workpiece with the traversing direction of the stage.
䋨䋱䋩
Follow the procedure in "2.4.3 (1) Adjusting the reticle with the XY stage moving
direction".
䋨䋱䋩
Move the workpiece or the fixing jigs to align the measuring direction of the workpiece with the
cross-hair reticle.
After making the above adjustment, confirm that the workpiece is parallel with the traveling direction
by moving the XY stage.