CONTENTS
PREFACE...........................................................................................................................
CONVENTIONS USED IN THIS MANUAL...................................................................
PRECAUTIONS.................................................................................................................
WARRANTY .....................................................................................................................
1. Outline ..............................................................................................................................7
1.1 Description.............................................................................................................. 7
2 Name of Each Part .................................................................................................8
2. Installation and Setup .....................................................................................................11
2.1 Package Contents.................................................................................................. 11
2.2 Installation Site ..................................................................................................... 11
2.3 Setting-up..............................................................................................................12
2.4 Checking and Adjustment..................................................................................... 13
2.4.1 Checking the reticle position against the XY stage movement direction ..13
2.4.2 Checking the centering of the reticle .........................................................13
2.4.3 Adjusting the reticle................................................................................... 14
3. Measurement ..................................................................................................................17
3.1 Preparations for Measurement..............................................................................17
3.1.1 Precautions for measurement ..................................................................... 17
3.1.2 Replacing the lenses...................................................................................18
3.1.3 Fixing the workpiece..................................................................................18
3.1.4 Illumination modes..................................................................................... 19
3.1.5 Replacing reticles....................................................................................... 20
3.1.6 Adjusting the diopter.................................................................................. 20
3.1.7 Bringing the measuring surface into focus................................................. 21
3.1.8 Positioning the workpiece ..........................................................................21
CONTENTS
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