3. Measurement
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3.2.2 Angle measurement
Angles are measured with the angle dial, using either of the following two procedures.
(1) (2)
(1) Align an edge of the workpiece with the cross-hair reticle and align the end edge with the center
of the cross-hair. Turn the angle dial to align the cross-hair with the other edge of the workpiece.
Take readings from the angle dial.
(2)
Align two edges of the workpiece with the same cross-hair, one after another, by turning the
angle dial and moving the XY stage. Take readings from the angle dial.
㩷
1䋮In both procedures, measuring points on the workpiece are aligned with a cross-hair, one after
another. The angle is determined from the difference in readings.
2䋮The resolution of the angle dial is 1q with the main scale and 6' with the vernier scale.
㩷㩷㩷㩷㩷<Reading the angle dial>
Main scale䋺34¡
34¡42㶅
Vernier scale䋺42㶅
3䋮The zero position of the angle dial can be adjusted by turning the vernier scale. This allows the
angle measurement origin to be set to 0.
CAUTION
After turning the vernier scale, check the reticle position. Refer to "2.4.3 (1) Adjusting the reticle
against the XY stage moving direction" if necessary.
